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Top 8 Vacuum Solutions for the Semiconductor Industry

Posted on January 22, 2017

Semiconductor manufacturing facilities often contain toxic substances as well as combustible dust. Good housekeeping practices can go a long way toward protecting your employees and your buildings from these environmental risks.

Here are our top 8 vacuum solutions for the semiconductor industry.

118 EXP

Designed for capturing and retaining dry materials, the 118 EXP vacuum is perfect for smaller facilities. This electric vacuum cleaner is explosion-proof and dust ignition-proof. And it’s CSA-approved for use in Class I, Group D and Class II, Groups E, F, and G locations.


For areas where electricity isn’t available or poses a risk, you can’t go wrong with the explosion-proof A15 EXP. This small air-powered vacuum is also CSA-approved for use in Class I, Group D and Class II, Groups E, F, and G locations, as well as ATEX-approved for zones 1, 2, 21, and 22.


The cleanliness requirements for semiconductor cleanrooms can be as high or even higher than those for pharmaceutical cleanrooms! In these cases, you need a vacuum cleaner that can capture even the finest particles to prevent product contamination.

The stainless steel VHS110 CR wet/dry vacuum is compatible up to and including Class 10 (ISO 4) environments. It has the PullClean filter cleaning system, a downstream ULPA filter, and an optional upstream HEPA or ULPA filter for ultimate filtration efficiency.


Another powerful cleanroom solution, the lightweight GM80 CR is also compatible to ISO 4 (Class 10). Designed for versatility and portability, this vacuum allows you to collect dusts from even the most hard-to-reach places. And its four-stage filtration system guarantees that, once retained, even the smallest particles won’t escape back into the environment.


Not every semiconductor manufacturing environment must meet cleanroom standards. But you still want the best, easy-to-use equipment available. For this, the GM80 HEPA filter vacuum will do the trick. Thanks to its affordability, durability, and performance, the GM80 has become an icon across many industries.

IVT1000 CR with SAFE-PAK

he IVT1000 CR is both an exceptionally efficient and an exceptionally quiet cleanroom vacuum. With its stainless steel construction and multistage filtration system, this vacuum can handle the toughest cleaning challenges, especially when equipped with the optional SAFE-PAK container for the collection, containment, and disposal of potent compounds. This is our smallest vacuum with the optional SAFE-PAK.

As an added bonus, the collection container and trolley are autoclave-safe. And, it’s available with an optional electrostatic discharge (ESD) or autoclave-safe accessory kit.

SS Vapor

Cleaning semiconductor process equipment often results in the release of toxic gases. The SS vapor vacuum provides the perfect solution. This vacuum contains an impregnated carbon filter cartridge, which makes it particularly effective at capturing and retaining toxic gases and ultrafine particulates.


Finally, the VT60 CR allows you to simultaneously pick up wet and dry debris without having to make any adjustments or switch the filter. This vacuum, designed for cleanrooms, features a system that prevents motor carbon dust from escaping via the exhaust. The main filter is resistant to water, rot, mildew, and corrosion, and the optional HEPA and ULPA filters ensure efficient collection of even the tiniest particles.

Want to learn more about any of these vacuums? Looking for a solution not listed here? Contact us. We’re here to help.